Patent Assignment
Reel/Frame 037310/0406
Assignment of Assignor's Interest
Recorded: 2015-12-16
Pages: 3
Assignor
TAPILY, KANDABARA N.
Executed: 2015-12-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Selective Gas Phase Film Deposition on a Substrate by Modifying the Surface Using Hydrogen Plasma