Patent Assignment
Reel/Frame 037321/0176
Assignment of Assignor's Interest
Recorded: 2015-12-17
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Patterning a Substrate Using Grafting Polymer Material