Patent Assignment
Reel/Frame 037324/0057
Assignment of Assignor's Interest
Recorded: 2015-12-18
Pages: 5
Assignors
CHEN, AMÖ
Executed: 2015-12-07
LIN, YUN-YUE
Executed: 2015-12-07
LIEN, TI-CHENG
Executed: 2015-12-07
LIEN, TA-CHENG
Executed: 2015-12-07
LEE, HSIN-CHANG
Executed: 2015-12-07
LIN, CHIH-CHENG
Executed: 2015-12-07
CHEN, JENG-HORNG
Executed: 2015-12-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Pellicle Assembly and Method for Advanced Lithography