Patent Assignment
Reel/Frame 037334/0327
Assignment of Assignor's Interest
Recorded: 2015-12-18
Pages: 3
Assignors
BARRY, SEAN T.
Executed: 2007-02-16
WASSLEN, YAMILE A.M.
Executed: 2007-02-16
RAHTU, ANTTI H.
Executed: 2007-01-23
Assignee
ASM MICROCHEMISTRY OY
VAINE AUERIN KATU 12A, HELSINKI, 00560, FINLAND
Covered Property
(1)
ALD of metal-containing films using cyclopentadienyl compounds
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.