Patent Assignment
Reel/Frame 037347/0709
Assignment of Assignor's Interest
Recorded: 2015-12-22
Pages: 3
Assignors
TAKEDA, RYOHEI
Executed: 2015-12-09
TAKASHIMA, RYUICHI
Executed: 2015-12-09
OOYA, YOSHINOBU
Executed: 2015-12-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Etching Apparatus