Patent Assignment
Reel/Frame 037347/0818
Assignment of Assignor's Interest
Recorded: 2015-12-22
Pages: 6
Assignors
HAGA, HIROFUMI
Executed: 2015-12-17
NAKAO, NOBUTAKA
Executed: 2015-12-17
YAKUSHIJI, HIDEAKI
Executed: 2015-12-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Evacuation Method and Vacuum Processing Apparatus