Patent Assignment
Reel/Frame 037350/0370
Assignment of Assignor's Interest
Recorded: 2015-12-22
Pages: 10
Assignors
YANG, DENGLIANG
Executed: 2015-12-03
EASON, KWAME
Executed: 2015-12-18
YAQOOB, FAISAL
Executed: 2015-11-24
PARK, JOON HONG
Executed: 2015-11-24
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ultrahigh Selective Polysilicon Etch with High Throughput