Patent Assignment
Reel/Frame 037350/0744
Assignment of Assignor's Interest
Recorded: 2015-12-22
Pages: 5
Assignors
TAKAHASHI, TSUYOSHI
Executed: 2015-12-10
SANO, MASAKI
Executed: 2015-12-10
KAMIO, TAKASHI
Executed: 2015-12-10
TAKAGI, TOSHIO
Executed: 2015-12-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus