Patent Assignment
Reel/Frame 037353/0080
Assignment of Assignor's Interest
Recorded: 2015-12-22
Pages: 6
Assignors
KO, KANG-WOONG
Executed: 2015-12-04
JEON, HYOUNG-JO
Executed: 2015-12-04
HORIE, MASAHIRO
Executed: 2015-12-04
SONG, GIL-WOO
Executed: 2015-12-04
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Method for Detecting Overlay Error and Method for Manufacturing Semiconductor Device Using the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.