Patent Assignment
Reel/Frame 037377/0925
Assignment of Assignor's Interest
Recorded: 2015-12-29
Pages: 3
Assignors
HUANG, FU-MING
Executed: 2015-09-30
CHEN, LIANG-GUANG
Executed: 2015-09-30
CHANG, TING-KUI
Executed: 2015-09-30
LIN, CHUN-CHIEH
Executed: 2015-09-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Post-CMP Cleaning and Apparatus