Patent Assignment
Reel/Frame 037382/0663
Assignment of Assignor's Interest
Recorded: 2015-12-30
Pages: 2
Assignor
LIN, HSIANG-WEI
Executed: 2015-11-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Multi-Barrier Deposition for Air Gap Formation