Patent Assignment
Reel/Frame 037399/0991
Assignment of Assignor's Interest
Recorded: 2016-01-04
Pages: 2
Assignors
YEN, YU-TING
Executed: 2015-12-08
TSAI, CHI-MING
Executed: 2015-12-08
HUANG, HUI-CHI
Executed: 2015-12-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Detecting the Cleanness of Wafer After Post-Cmp Cleaning