Patent Assignment
Reel/Frame 037417/0124
Assignment of Assignor's Interest
Recorded: 2016-01-06
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Gas-Purging Method, Method for Manufacturing Semiconductor Device, and Recording Medium Containing Abnormality-Processing Program
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.