Assignment of Assignor's Interest

Recorded: 2016-01-08 Pages: 4

Assignors

BRAVO, ANDREW STRATTON

Executed: 2015-12-07

GUHA, JOYDEEP

Executed: 2016-01-07

PHARKYA, AMIT

Executed: 2015-12-15

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Systems and Methods for Eliminating Flourine Residue in a Substrate Processing Chamber Using a Plasma-Based Process

Patent: 9,601,319 →

Application: 14/990,320 →