Patent Assignment
Reel/Frame 037455/0965
Assignment of Assignor's Interest
Recorded: 2016-01-11
Pages: 6
Assignors
WEST, BRIAN T.
Executed: 2015-12-17
GAJENDRA, MANOJ A.
Executed: 2015-12-18
JEMBULINGAM, SOUNDARRAJAN
Executed: 2015-12-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Gas Cooled Electrostatic Chuck (Esc) Having a Gas Channel Formed Therein and Coupled to a Gas Box on Both Ends of the Gas Channel