Patent Assignment
Reel/Frame 037479/0305
Assignment of Assignor's Interest
Recorded: 2016-01-13
Pages: 7
Assignors
LU, YEN-WEN
Executed: 2015-02-09
CHEN, JAY JIANHUI
Executed: 2015-02-09
LIU, WEI
Executed: 2015-05-01
MENCHTCHIKOV, BORIS
Executed: 2015-02-06
WANG, JEN-SHIANG
Executed: 2015-02-06
HUANG, TE-CHIH
Executed: 2014-11-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus