Patent Assignment
Reel/Frame 037486/0339
Assignment of Assignor's Interest
Recorded: 2016-01-14
Pages: 4
Assignors
TERTITSKI, LEONID M.
Executed: 2015-10-27
CHU, SCHUBERT S.
Executed: 2015-10-23
ASSAF, SHAY
Executed: 2015-11-02
VELLORE, KIM R.
Executed: 2015-10-22
CONG, ZHEPENG
Executed: 2015-10-22
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
System and Method to Detect Substrate and/or Substrate Support Misalignment Using Imaging