Patent Assignment
Reel/Frame 037492/0076
Assignment of Assignor's Interest
Recorded: 2016-01-14
Pages: 2
Assignors
TERAUCHI, HIROMITSU
Executed: 2015-12-25
IIDA, TSUTOMU
Executed: 2015-12-25
OOHIRABARU, YUUZOU
Executed: 2015-12-25
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU,, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.