Patent Assignment
Reel/Frame 037497/0370
Assignment of Assignor's Interest
Recorded: 2016-01-15
Pages: 4
Assignors
CHANDRASEKHARAN, RAMESH
Executed: 2015-09-30
SWAMINATHAN, SHANKAR
Executed: 2015-09-30
LAVOIE, ADRIEN
Executed: 2015-09-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Purge and Pumping Structures Arranged Beneath Substrate Plane to Reduce Defects