Patent Assignment
Reel/Frame 037504/0358
Assignment of Assignor's Interest
Recorded: 2016-01-15
Pages: 12
Assignors
MATSUO, HISANORI
Executed: 2016-01-08
SUZUKI, KEISUKE
Executed: 2016-01-08
TAJIRI, TAKAHIRO
Executed: 2016-01-08
KHAJORNRUNGRUANG, PANART
Executed: 2016-01-08
MOCHIZUKI, YOSHIHIRO
Executed: 2016-01-08
Assignees
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
KYUSHU INSTITUTE OF TECHNOLOGY
1-1 SENSUI-CHO, TOBATA-KU, KITAKYUSHU-SHI, FUKUOKA, JAPAN
Covered Property
(1)
Method and Apparatus for Measuring Surface Properties of Polishing Pad