Patent Assignment
Reel/Frame 037520/0157
Assignment of Assignor's Interest
Recorded: 2016-01-19
Pages: 8
Assignors
BUDACH, MICHAEL
Executed: 2015-12-14
BAUR, CHRISTOF
Executed: 2015-12-14
CUJAS, DAJANA
Executed: 2015-12-14
HEBERLEIN, ROBERT
Executed: 2015-12-14
BATZ, MARION
Executed: 2015-12-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Scanning Particle Microscope and Method for Determining a Position Change of a Particle Beam of the Scanning Particle Microscope