Patent Assignment
Reel/Frame 037525/0299
Assignment of Assignor's Interest
Recorded: 2016-01-19
Pages: 3
Assignor
MIYAMA, RYO
Executed: 2016-01-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Presetting Tuner of Plasma Processing Apparatus and Plasma Processing Apparatus