Patent Assignment
Reel/Frame 037531/0306
Assignment of Assignor's Interest
Recorded: 2016-01-20
Pages: 18
Assignors
MA, TRISTAN Y.
Executed: 2016-01-13
HAUTALA, JOHN
Executed: 2016-01-19
PETTERSON, MAUREEN K.
Executed: 2016-01-13
CUI, BOYA
Executed: 2016-01-07
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Ion Implantation for Improved Contact Hole Critical Dimension Uniformity