Patent Assignment
Reel/Frame 037533/0022
Assignment of Assignor's Interest
Recorded: 2016-01-20
Pages: 14
Assignors
CHEN, TSUNG-LIANG
Executed: 2016-01-13
HAUTALA, JOHN
Executed: 2016-01-19
LIANG, SHURONG
Executed: 2016-01-13
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Apparatus and Techniques for Filling a Cavity Using Angled Ion Beam