Patent Assignment
Reel/Frame 037553/0982
Assignment of Assignor's Interest
Recorded: 2016-01-21
Pages: 4
Assignors
BAEK, JONGHOON
Executed: 2016-01-13
ABRAHAM, MATHEW CHEERAN
Executed: 2016-01-17
EVANS, DAVID ROBERT
Executed: 2016-01-14
GAZZA, JACK MICHAEL
Executed: 2016-01-13
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, 5504 DR, P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
System, Method and Apparatus for Target Material Debris Cleaning of Euv Vessel and Euv Collector