Patent Assignment
Reel/Frame 037556/0570
Assignment of Assignor's Interest
Recorded: 2016-01-22
Pages: 7
Assignors
WAMURA, YU
Executed: 2015-12-07
HAYASE, FUMIAKI
Executed: 2015-12-07
KAMINISHI, MASAHIKO
Executed: 2015-12-07
TAKAHASHI, KOSUKE
Executed: 2015-12-08
SASAKI, YU
Executed: 2015-12-07
SASAKI, HIROKO
Executed: 2015-12-08
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Detoxifying Exhaust Pipe and Film Forming Apparatus