Patent Assignment
Reel/Frame 037559/0772
Assignment of Assignor's Interest
Recorded: 2016-01-22
Pages: 2
Assignors
CHANG, KAI-FUNG
Executed: 2016-01-15
LEU, LEN-YI
Executed: 2016-01-15
TSAI, LIEN-YAO
Executed: 2016-01-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
MEMS Devices and Methods of Forming the Same