Patent Assignment
Reel/Frame 037572/0732
Assignment of Assignor's Interest
Recorded: 2016-01-25
Pages: 3
Assignor
CHEN, YU-CHI
Executed: 2013-11-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and Apparatus for Electron Beam Lithography