Assignment of Assignor's Interest

Recorded: 2016-01-26 Pages: 7

Assignors

YAMAMOTO, TETSUO

Executed: 2016-01-22

TOYODA, KAZUYUKI

Executed: 2016-01-15

MATSUI, SHUN

Executed: 2016-01-15

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus

Application: 15/006,174 →

Publication: US 2016/0276135

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.