Patent Assignment
Reel/Frame 037585/0389
Assignment of Assignor's Interest
Recorded: 2016-01-26
Pages: 3
Assignors
JHUAN, CHUN-SYUAN
Executed: 2016-01-15
CHEN, MING-JUNG
Executed: 2016-01-15
KU, SHAO-YEN
Executed: 2016-01-15
SU, TSAI-PAO
Executed: 2016-01-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methods for Processing Substrate in Semiconductor Fabrication