Patent Assignment
Reel/Frame 037605/0764
Assignment of Assignor's Interest
Recorded: 2016-01-28
Pages: 5
Assignors
PETERS, JAN HENDRIK
Executed: 2016-01-07
BLUMRICH, FREDERIK
Executed: 2016-01-07
GARETTO, ANTHONY
Executed: 2016-01-12
SCHERÜBL, THOMAS
Executed: 2016-01-07
CAPELLI, RENZO
Executed: 2016-01-19
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and System for EUV Mask Blank Buried Defect Analysis
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.