Patent Assignment
Reel/Frame 037621/0177
Assignment of Assignor's Interest
Recorded: 2016-01-29
Pages: 6
Assignors
KOEZUKA, JUNICHI
Executed: 2016-01-19
OKAZAKI, KENICHI
Executed: 2016-01-19
KUROSAKI, DAISUKE
Executed: 2016-01-19
JINTYOU, MASAMI
Executed: 2016-01-19
YAMAZAKI, SHUNPEI
Executed: 2016-01-15
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing a Semiconductor Device at Low Temperature