Patent Assignment
Reel/Frame 037624/0358
Assignment of Assignor's Interest
Recorded: 2016-01-29
Pages: 7
Assignors
YAMAMOTO, RYUJI
Executed: 2015-02-23
SHIMAMOTO, SATOSHI
Executed: 2015-02-20
YOSHIRO, HIROSE
Executed: 2015-02-20
Assignee
HITACHI KOKUSAI ELECTRIC
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.