Patent Assignment
Reel/Frame 037656/0706
Assignment of Assignor's Interest
Recorded: 2016-02-03
Pages: 6
Assignors
YANG, DENGLIANG
Executed: 2016-01-29
ZHU, HELEN H.
Executed: 2016-02-01
MATAMIS, GEORGE
Executed: 2016-01-29
JACOBS, BRAD
Executed: 2016-01-29
PARK, JOON HONG
Executed: 2016-01-29
GUHA, JOYDEEP
Executed: 2016-02-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Selectively Etching Tungsten in a Downstream Reactor