Patent Assignment
Reel/Frame 037681/0038
Assignment of Assignor's Interest
Recorded: 2016-02-08
Pages: 3
Assignors
WANG, CHIEN-WEI
Executed: 2010-01-29
SHIEH, MING-FENG
Executed: 2010-01-29
CHANG, CHING-YU
Executed: 2010-01-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and Apparatus of Patterning a Semiconductor Device