Assignment of Assignor's Interest

Recorded: 2016-02-09 Pages: 3

Assignors

URAKAWA, MASAFUMI

Executed: 2016-01-20

NAGAMI, KOICHI

Executed: 2016-01-20

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN

Covered Property (1)

Plasma Processing Method and Plasma Processing Apparatus

Patent: 9,870,898 →

Application: 15/018,981 →

Publication: US 2016/0247666