Patent Assignment
Reel/Frame 037696/0155
Assignment of Assignor's Interest
Recorded: 2016-02-10
Pages: 5
Assignor
KATO, HITOSHI
Executed: 2016-01-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Holding Mechanism and Substrate Processing Apparatus Using the Same