Patent Assignment
Reel/Frame 037715/0727
Assignment of Assignor's Interest
Recorded: 2016-02-11
Pages: 6
Assignors
HASEGAWA, KOJI
Executed: 2016-01-20
SAGEHASHI, MASAYOSHI
Executed: 2016-01-20
FUKUSHIMA, MASAHIRO
Executed: 2016-01-20
TANIGUCHI, RYOSUKE
Executed: 2016-01-20
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Hemiacetal Compound, Polymer, Resist Composition, and Patterning Process