Patent Assignment
Reel/Frame 037767/0497
Assignment of Assignor's Interest
Recorded: 2016-02-18
Pages: 4
Assignor
KELLOGG, MICHAEL
Executed: 2016-02-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
3D Printed Plasma Arrestor for an Electrostatic Chuck