3D printed plasma arrestor for an electrostatic chuck
A method for manufacturing an arrestor for an electrostatic chuck includes printing first layers of an arrestor for an electrostatic chuck using a 3-D printer and an electrically non-conductive material. The first layers of the arrestor at least partially define a first opening to a gas flow channel. The method includes printing intermediate layers of the arrestor using the 3-D printer and the electrically non-conductive material. The intermediate layers of the arrestor at least partially define the gas flow channel. The method includes printing second layers of the arrestor using the 3-D printer and the electrically non-conductive material. The second layers of the arrestor at least partially define a second opening of the gas flow channel. At least one of the first opening, the second opening and/or the gas flow channel of the arrestor is arranged to prevent a direct line of sight between the first opening and the second opening of the arrestor.
1. A method for manufacturing a plasma arrestor for an electrostatic chuck configured to support a semiconductor substrate during processing, the electrostatic chuck including at least one plasma arrestor, the method comprising:
using a 3-D printer to manufacture the plasma arrestor by:
printing first, lower layers of the plasma arrestor using an electrically non-conductive material, wherein the first, lower layers of the plasma arrestor include and at least partially define a first opening to a gas flow channel through the first, lower layers in a vertical direction;
subsequent to printing the first, lower layers, printing intermediate layers of the plasma arrestor on the first, lower layers using the electrically non-conductive material, wherein the intermediate layers of the plasma arrestor at least partially define the gas flow channel and connect the gas flow channel to the first opening defined in the first, lower layers; and
subsequent to printing the intermediate layers, printing second, upper layers of the plasma arrestor on the intermediate layers using the electrically non-conductive material, wherein the second, upper layers of the plasma arrestor include and at least partially define a second opening of the gas flow channel through the second, upper layers in the vertical direction, and wherein at least one of the first opening, the second opening and/or the gas flow channel of the plasma arrestor is arranged to prevent a direct line of sight between the first opening and the second opening of the plasma arrestor; and
arranging the plasma arrestor in an opening in the electrostatic chuck such that the plasma arrestor provides fluid communication between a first gas flow channel in a baseplate of the electrostatic chuck and a second gas flow channel in a ceramic body of the electrostatic chuck.
2. The method of claim 1 , wherein the plasma arrestor is made of ceramic.
3. The method of claim 1 , wherein the plasma arrestor is made of glass.
4. The method of claim 1 , wherein the plasma arrestor is made of plastic.
5. The method of claim 1 , wherein the plasma arrestor has a cylindrical outer shape.
6. The method of claim 1 , wherein the direct line of sight is a straight line defined between the first opening and the second opening and wherein the gas flow channel deviates relative to the direct line of sight.
7. The method of claim 1 , wherein one of the first opening and the second opening is arranged at a center of a first surface of the plasma arrestor and the other of the first opening and the second opening is arranged on a second surface of the plasma arrestor at an offset location relative to a center of the second surface of the plasma arrestor.
8. The method of claim 1 , wherein the first opening comprises a gas inlet of the plasma arrestor and the second opening comprises a gas outlet of the plasma arrestor.
9. The method of claim 1 , wherein the first opening comprises a gas outlet of the plasma arrestor and the second opening comprises a gas inlet of the plasma arrestor.