Patent Assignment
Reel/Frame 037779/0210
Assignment of Assignor's Interest
Recorded: 2016-02-19
Pages: 7
Assignors
SHIMAMOTO, SATOSHI
Executed: 2013-03-18
ORIHASHI, YUGO
Executed: 2013-03-19
HASHIMOTO, YOSHITOMO
Executed: 2013-03-18
HIROSE, YOSHIRO
Executed: 2013-03-18
Assignee
HITACHI KOKUSAI ELECTRIC
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.