Patent Assignment
Reel/Frame 037779/0622
Assignment of Assignor's Interest
Recorded: 2016-02-19
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Silicon Nitride Film Selectively on Sidewalls or Flat Surfaces of Trenches