Patent Assignment
Reel/Frame 037782/0891
Assignment of Assignor's Interest
Recorded: 2016-02-22
Pages: 3
Assignors
JAK, MARTIN JACOBUS JOHAN
Executed: 2012-06-19
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2012-06-20
SMILDE, HENDRIK JAN HIDDE
Executed: 2012-06-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method