Patent Assignment
Reel/Frame 037815/0175
Assignment of Assignor's Interest
Recorded: 2016-02-24
Pages: 4
Assignor
INOSHIMA, KAORI
Executed: 2016-02-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Maintenance Method of Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Storage Medium Capable of Reading Maintenance Program of Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.