Patent Assignment
Reel/Frame 037830/0757
Assignment of Assignor's Interest
Recorded: 2016-02-25
Pages: 7
Assignors
SASAJIMA, RYOTA
Executed: 2016-02-19
KOGURA, SHINTARO
Executed: 2016-02-19
MINAMI, MASAYOSHI
Executed: 2016-02-19
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.