Patent Assignment
Reel/Frame 037853/0474
Assignment of Assignor's Interest
Recorded: 2016-02-29
Pages: 4
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Systems and Methods for Detecting the Existence of One or More Environmental Conditions Within a Substrate Processing System