Patent Assignment
Reel/Frame 037858/0289
Assignment of Assignor's Interest
Recorded: 2016-03-01
Pages: 2
Assignors
ARAMAKI, TOORU
Executed: 2016-01-07
YOKOGAWA, KENETSU
Executed: 2016-01-07
IZAWA, MASARU
Executed: 2016-01-07
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU,, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.