Patent Assignment
Reel/Frame 037881/0034
Assignment of Assignor's Interest
Recorded: 2016-03-03
Pages: 4
Assignors
BAILEY III, ANDREW D.
Executed: 2016-02-22
TETIKER, MEHMET DERYA
Executed: 2016-02-23
MILLS, DUNCAN W.
Executed: 2016-02-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Etch Metric Sensitivity for Endpoint Detection