Patent Assignment
Reel/Frame 037889/0802
Assignment of Assignor's Interest
Recorded: 2016-03-04
Pages: 3
Assignors
SHOJAEI, OMID REZA
Executed: 2016-02-16
SCHMITT, JACQUES
Executed: 2016-02-18
JEANNERET, FABRICE
Executed: 2016-02-16
Assignee
INDEOTEC SA
RUE DU PUITS-GODET 12A, NEUCHATEL, CH-2000, SWITZERLAND
Covered Property
(1)
Plasma Reactor Vessel Having Improved Plasma Uniformity Comprised of a First Electrode, a Second Electrode Opposed to the First Electrode, and a Third Electrode Between a Substrate Carrier and the Second Electrode