Patent Assignment
Reel/Frame 037947/0485
Assignment of Assignor's Interest
Recorded: 2016-03-10
Pages: 2
Assignee
HITACHI HIGH-TECH SCIENCE CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-0003, JAPAN
Covered Property
(1)
Heat Transfer System For An Inductively Coupled Plasma Device